The thresholds of surface nano-/micro-morphology modifications with femtosecond laser pulse irradiations.

We studied the pulse energy threshold of surface nano-/micro-morphology modifications by irradiating Si, GaAs, GaP, InP, Cu and Ti surfaces with 100 fs laser pulses at a wavelength of 800 nm in air and in water. We found that the laser pulse energy thresholds required for the permanent modification in water are up to 30% lower than those in air. Different non-equilibrium dynamics processes of the surface melting layer cause the different thresholds in water and in air.