Literature DB >> 19928828

Chemical mechanical planarization: slurry chemistry, materials, and mechanisms.

Mahadevaiyer Krishnan1, Jakub W Nalaskowski, Lee M Cook.   

Abstract

Year:  2010        PMID： 19928828     DOI： 10.1021/cr900170z

Source DB:  PubMed          Journal:  Chem Rev        ISSN： 0009-2665            Impact factor:   60.622


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  7 in total

1.  Cerium dioxide (CeO2) nanoparticles decrease arsenite (As(III)) cytotoxicity to 16HBE14o- human bronchial epithelial cells.

Authors:  Chao Zeng; Chi Nguyen; Scott Boitano; Jim A Field; Farhang Shadman; Reyes Sierra-Alvarez
Journal:  Environ Res       Date:  2018-03-22       Impact factor: 6.498

2.  Anisotropic mechanical amorphization drives wear in diamond.

Authors:  Lars Pastewka; Stefan Moser; Peter Gumbsch; Michael Moseler
Journal:  Nat Mater       Date:  2010-11-28       Impact factor: 43.841

3.  Changing the calcination temperature to tune the microstructure and polishing properties of ceria octahedrons.

Authors:  Yongxiu Li; Xueliang Wang; Linmin Ding; Yao Li; Rucheng He; Jing Li
Journal:  RSC Adv       Date:  2022-06-06       Impact factor: 4.036

4.  Silica based polishing of {100} and {111} single crystal diamond.

Authors:  Evan L H Thomas; Soumen Mandal; Emmanuel B Brousseau; Oliver A Williams
Journal:  Sci Technol Adv Mater       Date:  2014-06-24       Impact factor: 8.090

5.  Mechanistic insights into the acetate-accelerated synthesis of crystalline ceria nanoparticles.

Authors:  Tamra J Fisher; Deepa Choudhry; Kaitlynn Derr; Soodabeh Azadehranjbar; Dan Stasko; Chin Li Cheung
Journal:  RSC Adv       Date:  2020-05-29       Impact factor: 3.361

6.  A High Efficiency and Precision Smoothing Polishing Method for NiP Coating of Metal Mirror.

Authors:  Chao Xu; Xiaoqiang Peng; Junfeng Liu; Hao Hu; Tao Lai; Qilin Yang; Yupeng Xiong
Journal:  Micromachines (Basel)       Date:  2022-07-25       Impact factor: 3.523

7.  Effect of slurry composition on the chemical mechanical polishing of thin diamond films.

Authors:  Jessica M Werrell; Soumen Mandal; Evan L H Thomas; Emmanuel B Brousseau; Ryan Lewis; Paola Borri; Philip R Davies; Oliver A Williams
Journal:  Sci Technol Adv Mater       Date:  2017-09-15       Impact factor: 8.090
  7 in total

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