| Literature DB >> 19921009 |
Xinhua Liang1, Miao Yu, Jianhua Li, Ying-Bing Jiang, Alan W Weimer.
Abstract
Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.Entities:
Year: 2009 PMID: 19921009 DOI: 10.1039/b911888h
Source DB: PubMed Journal: Chem Commun (Camb) ISSN: 1359-7345 Impact factor: 6.222