Spatially coherent, phase matched, high-order harmonic EUV beams at 50 kHz.

By focusing a high repetition rate (50 kHz), compact, femtosecond laser system with low pulse energy (25 muJ) using a tight-focusing geometry, we demonstrate fully phase matched high-order harmonic generation for the first time at very high repetition rates, resulting in EUV light with full spatial coherence. The result is a practical, single-box, coherent source useful for applications in metrology, ultrafast spectroscopy, imaging and microscopy. The soft x-ray flux can be improved further by increasing the laser pulse energy and/or repetition rate.