An infrared imaging method for high-throughput combinatorial investigation of hydrogenation-dehydrogenation and new phase formation of thin films.

We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg-Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg2Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.