Investigation of optical testing with a phase-only liquid crystal spatial light modulator.

We illustrate that the phase-only liquid crystal spatial light modulator (LC SLM) can be used for optical testing. The large phase change and the phase modulation precision are discussed. The computer generated holograms (CGH) method is used to acquire the significant phase modulation. And the phase modulating characteristics of the LC SLM are measured. It shows the phase modulation depth is more than 2pi and the modulation precision is down to 1/14lambda (PV) and 1/100lambda (rms) (lambda=632.8nm). In order to verify this method, the former surface of a convex lens is tested by ZYGO interferometer. The parallel straight fringes are obtained. It is shown that PV is 1/3lambda and rms is 1/20lambda after compensated by the LC SLM.