Magnetic force driven six degree-of-freedom active vibration isolation system using a phase compensated velocity sensor.

A six-axis active vibration isolation system (AVIS) is developed using voice coil actuators. Point contact configuration is employed to have an easy assembly of eight voice coil actuators to an upper and a base plates. The velocity sensor, using an electromagnetic principle that is commonly used in the vibration control, is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. The performances of the AVIS are investigated in the frequency domain and finally validated by comparing with the passive isolation system using the atomic force microscope images.