| Literature DB >> 19404370 |
Abstract
The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.Year: 2000 PMID: 19404370 DOI: 10.1364/oe.7.000056
Source DB: PubMed Journal: Opt Express ISSN: 1094-4087 Impact factor: 3.894