Qualification of the tomographic reconstruction in atom probe by advanced spatial distribution map techniques.

New and improved spatial distribution map (SDM) methods are developed to identify and extract crystallographic information within atom probe tomography three-dimensional (3D) reconstructions. Detailed structural information is retrieved by combining z-SDM offset distribution analyses computed in multiple crystallographic directions, accurately determining inter-planar spacings and crystallographic angles. The advantages of this technique in comparison to applying the complete z-SDM and complementary xy-SDM analysis to a single crystallographic direction are investigated. Further, in determining these multidirectional z-SDM and xy-SDM profiles, background noise reduction and automatic peak identification algorithms are adapted to attain increased accuracy and is shown to be particularly effective in cases where crystal structure is present but poorly resolved. These techniques may be used to calibrate the reconstruction parameters and investigate their dependence on the design of individual atom probe experiments.