Development of a microfocus x-ray tube with multiple excitation sources.

A microfocus x-ray tube with multiple targets and an electron gun with a focal spot size of 10 microm in diameter has been developed. The electron gun contains a LaB(6) cathode and an Einzel lens. The x-ray tube can be operated at 50 W (50 kV, 1 mA) and has three targets, namely, Cr, W, and Rh on the anode that can be selected completely by moving the anode position. A focal spot size of 10 microm in diameter can be achieved at 0.5 mA current. As demonstration of the usability of a multiexcitation x-ray tube, the fluorescence x-rays have been measured using a powder specimen mixed of TiO(2), Co, and Zr of the same quantity. The differences of excitation efficiency have clearly appeared according to the change in excitation source. From the results discussed here, it can be expected that the presented x-ray tube will be a powerful tool in microx-ray fluorescence spectrometers and various x-ray instruments.