Development of mid-infrared surface plasmon resonance-based sensors with highly-doped silicon for biomedical and chemical applications.

Biomedical and chemical sensors utilizing surface plasmon resonance (SPR) in the mid-infrared range were developed with the aid of highly doped silicon owing to its tailored optical constants. SPR may be excited by light incident on a periodic doping profile embedded in an intrinsic silicon film without constraints on the flow of chemical solutions or activities of biomedical samples. General guidance for tuning SPR wavelengths based on dispersion curves to catch different target materials in free space or water was also provided. The feasibility of sensors was demonstrated with a sharp spectral-directional reflectance dip, which shifted with optical constants variation. The effects of doping concentration, doping profile, and angle of incidence on sensor performance were numerically studied with a rigorous coupled-wave analysis algorithm. Developed sensors could work well for a real target and show superiority in sensitivity over existing sensors.