Nanostructuring of organic-inorganic hybrid materials for distributed feedback laser resonators by two-photon polymerization.

With two-photon absorption induced polymerization arbitrary three dimensional nano- and microstructures can be patterned directly into photoresists. We report on the fabrication of a low threshold organic semiconductor distributed feedback laser using the technique of two-photon absorption induced polymerization. A surface grating with 400 nm periodicity and 40 nm height modulation was fabricated by two-photon absorption induced polymerization in the organic-inorganic hybrid material ORMOCER. With structuring several stacked layers acting as a planar basis for the nanostructure microscopic substrate tilt can be compensated simply. This enabled us to uniformly nano-structure the surface grating over an area of 200 x 200 microm(2).