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Literature DB >> 19051184

Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography.

Julien Arcamone¹, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart, Juergen Brugger, Francesc Pérez-Murano.

Abstract

Mesh：

Substances：
Metals
Oxides

Year: 2009 PMID： 19051184 DOI： 10.1002/smll.200800699

Source DB: PubMed Journal: Small ISSN： 1613-6810 Impact factor: 13.281

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1 in total

1. A 0.35-μm CMOS-MEMS Oscillator for High-Resolution Distributed Mass Detection.

Authors: Rafel Perelló-Roig; Jaume Verd; Joan Barceló; Sebastià Bota; Jaume Segura
Journal: Micromachines (Basel) Date: 2018-09-22 Impact factor: 2.891

1 in total