| Literature DB >> 18852795 |
Luca Ferroglio1, Giovanni Mana, Enrico Massa.
Abstract
A combined X-ray and optical interferometer capable of centimeter displacements has been made to measure the lattice parameter of Si crystals to within a 3 x 10(-9) relative uncertainty. This paper relates the results of test measurements carried out to assess the capabilities of the apparatus.Entities:
Mesh:
Substances:
Year: 2008 PMID: 18852795 DOI: 10.1364/oe.16.016877
Source DB: PubMed Journal: Opt Express ISSN: 1094-4087 Impact factor: 3.894