| Literature DB >> 18699047 |
Abstract
A micropositioning stage has been developed for use with optical and electron microscopes in the accurate measurement of fine lines used by the microelectronics industry and microscopic objects such as biological cells, air pollution particles, and asbestos fibers. The stage combines a piezoelectric driving element and flexure pivoted lever arms to achieve a compact, vacuum compatible device with a resolution of 0.001 microm or less over a range of 50 microm.Entities:
Year: 1978 PMID： 18699047 DOI： 10.1063/1.1135327
Source DB: PubMed Journal: Rev Sci Instrum ISSN： 0034-6748 Impact factor: 1.523