Low-temperature thermolysis behavior of tetramethyl- and tetraethyldistibines.

The thermolysis behavior of tetramethyl- and tetraethyldistibine (Sb(2)Me(4) and Sb(2)Et(4)) was investigated using a mass spectrometer coupled to a tubular flow reactor under near-chemical vapor deposition (CVD) conditions. Sb(2)Me(4) undergoes a gas-phase disproportionation with an estimated activation energy of 163 kJ/mol. This reaction leads to the formation of methylstibinidine, SbMe, that reacts on the surface to produce antimony film and SbMe(3). Unfortunately, this clean decomposition pathway is limited to a narrow temperature range of 300-350 degrees C. At temperatures exceeding 400 degrees C, SbMe(3) decomposes following a radical route with a consequent risk of carbon contamination. In contrast, Sb(2)Et(4) disproportionates at the hot wall of the reactor. According to mass-spectrometric data, this reaction is significant starting at a temperature of 100 degrees C, with an apparent activation energy of 104 kJ/mol. Within the temperature range of 100-250 degrees C, the precursor decomposition leads to the formation of antimony films and SbEt(3), whereas different molecular reaction pathways are significantly activated above 250 degrees C. The use of Sb(2)Et(4) lowers the risk of carbon contamination compared to Sb(2)Me(4) at high temperature. Therefore, Sb(2)Et(4) is a promising CVD precursor for the growth of antimony films in the absence of hydrogen atmosphere in a wide temperature range.