Determination of particle size by using incidence-angle dependence of spectral intensity for particle-size-measurement method by applying infrared attenuated-total-reflection technique and its simulations by using algebraic-simultaneous equations.

A method using an incidence-angle dependence of the spectral intensity was proposed to determine a particle size in a particle-size measurement by applying an infrared attenuated-total-reflection (ATR) technique. A formula, which is proportional to the infrared ATR-spectral intensity, was constructed as a function of the particle size, amount of particles, and incidence angle, psi. Its psi dependences were calculated for SiO(2) particles of less than a mono layer on a Ge prism, and differed at every particle size. Some simulations of determining both particle size and particle amount were carried out for the samples of particles with sizes of 1 to 3 kinds by using algebraic-simultaneous equations with the software of Mathematica 5.2, and resulted in showing its usefulness.