Analysis of nonaxisymmetric vibration mode piezoelectric annular plate and its application to an ultrasonic motor.

The development of an ultrasonic motor using nonaxisymmetric vibration modes of a piezoelectric annular plate is described. A piezoelectric annular plate is analyzed to find its mode patterns, elliptic motions of displacement for the motor, and the distributions of the induced charge on the plate surface, and to calculate electromechanical coupling factors. On the basis of the analyzed results, motors using the annular plate have been built and their characteristics measured. The construction and characteristics of these motors are discussed.