Piezoelectric ultrasonic motor using longitudinal-torsional composite resonance vibration.

A piezoelectric ultrasonic motor, which uses longitudinal and torsional composite vibration, is examined in order to obtain high torque characteristics with small diameter. Piezoelectric ceramic elements, oscillating in both longitudinal and torsional modes, respectively, are used as piezoelectric stiffened modes having high electromechanical coupling factors k(33) and k(15), respectively. It is found that the resonant frequencies for longitudinal mode and torsional mode could coincide with each other in the ultrasonic motor, according to finite element method analysis and experimental measurement. The motor operating in both resonant vibrations indicated good performance. The 20-mm diameter motor exhibited 4 kgfcm maximum torque, 450 r/min maximum rotational speed, 40% maximum efficiency, and quick responsiveness, within 2.5 ms.