Literature DB >> 18238624

PZT thin films for microsensors and actuators: Where do we stand?

P Muralt1.   

Abstract

This paper reviews deposition, integration, and device fabrication of PbZr(x)Ti(1-x)O(3) (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.

Year:  2000        PMID： 18238624     DOI： 10.1109/58.852073

Source DB:  PubMed          Journal:  IEEE Trans Ultrason Ferroelectr Freq Control        ISSN： 0885-3010            Impact factor:   2.725


  9 in total

1.  Structure and electrical properties of (111)-oriented Pb(Mg1/3Nb2/3)O3-PbZrO3-PbTiO3 thin film for ultra-high-frequency transducer applications.

Authors:  Ben Peng Zhu; Wan Ke Guo; Guo Zhen Shen; Qifa Zhou; K Kirk Shung
Journal:  IEEE Trans Ultrason Ferroelectr Freq Control       Date:  2011-09       Impact factor: 2.725

Review 2.  Dielectric and Energy Storage Properties of Ba(1-x)CaxZryTi(1-y)O3 (BCZT): A Review.

Authors:  Mudassar Maraj; Wenwang Wei; Biaolin Peng; Wenhong Sun
Journal:  Materials (Basel)       Date:  2019-11-05       Impact factor: 3.623

Review 3.  Piezoelectric micromachined ultrasound transducer (PMUT) arrays for integrated sensing, actuation and imaging.

Authors:  Yongqiang Qiu; James V Gigliotti; Margeaux Wallace; Flavio Griggio; Christine E M Demore; Sandy Cochran; Susan Trolier-McKinstry
Journal:  Sensors (Basel)       Date:  2015-04-03       Impact factor: 3.576

4.  Intrinsic stability of ferroelectric and piezoelectric properties of epitaxial PbZr0.45Ti0.55O3 thin films on silicon in relation to grain tilt.

Authors:  Evert P Houwman; Minh D Nguyen; Matthijn Dekkers; Guus Rijnders
Journal:  Sci Technol Adv Mater       Date:  2013-07-30       Impact factor: 8.090

5.  Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer.

Authors:  Pham Ngoc Thao; Shinya Yoshida; Shuji Tanaka
Journal:  Micromachines (Basel)       Date:  2018-09-11       Impact factor: 2.891

Review 6.  Inorganic and Organic Solution-Processed Thin Film Devices.

Authors:  Morteza Eslamian
Journal:  Nanomicro Lett       Date:  2016-09-08

7.  Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array.

Authors:  Hong Goo Yeo; Joontaek Jung; Minkyung Sim; Jae Eun Jang; Hongsoo Choi
Journal:  Sensors (Basel)       Date:  2020-01-06       Impact factor: 3.576

Review 8.  Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications.

Authors:  Debdyuti Mandal; Sourav Banerjee
Journal:  Sensors (Basel)       Date:  2022-01-21       Impact factor: 3.576

9.  Optimization Of PVDF-TrFE Processing Conditions For The Fabrication Of Organic MEMS Resonators.

Authors:  Pierre-Henri Ducrot; Isabelle Dufour; Cédric Ayela
Journal:  Sci Rep       Date:  2016-01-21       Impact factor: 4.379
  9 in total

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