Piezoelectric micromotor using a metal-ceramic composite structure.

This paper presents a new piezoelectric micromotor design, in which a uniformly electroded piezoelectric ring bonded to a metal ring is used as the stator. Four inward arms at the inner circumference of the metal ring transfer radial displacements into tangential displacements. The rotor ends in a truncated cone shape and touches the tips of the arms. A rotation takes place by exciting coupled modes of the stator element, such as a radial mode and a second bending mode of the arms. The behavior of the free stator was analyzed using the ATILA finite element software. Torque vs. speed relationship was measured from the transient speed change with a motor load. A starting torque of 17 microNm was obtained at 20 Vrms. The main features of this motor are low cost and easy assembly because of a simple structure and small number of components.