Literature DB >> 18217046

Molybdenum-silicon multilayer mirrors for the extreme ultraviolet.

T W Barbee, S Mrowka, M C Hettrick.   

Abstract

Entities:  

Year:  1985        PMID： 18217046     DOI： 10.1364/ao.24.000883

Source DB:  PubMed          Journal:  Appl Opt        ISSN： 1559-128X            Impact factor:   1.980


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  3 in total

1.  Material-specific high-resolution table-top extreme ultraviolet microscopy.

Authors:  Wilhelm Eschen; Lars Loetgering; Vittoria Schuster; Robert Klas; Alexander Kirsche; Lutz Berthold; Michael Steinert; Thomas Pertsch; Herbert Gross; Michael Krause; Jens Limpert; Jan Rothhardt
Journal:  Light Sci Appl       Date:  2022-04-29       Impact factor: 20.257

2.  Multiparameter characterization of subnanometre Cr/Sc multilayers based on complementary measurements.

Authors:  Anton Haase; Saša Bajt; Philipp Hönicke; Victor Soltwisch; Frank Scholze
Journal:  J Appl Crystallogr       Date:  2016-11-24       Impact factor: 3.304

3.  Method for the Characterization of Extreme-Ultraviolet Photoresist Outgassing.

Authors:  Charles Tarrio
Journal:  J Res Natl Inst Stand Technol       Date:  2009-06-01
  3 in total

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