| Literature DB >> 17750110 |
G S Bales, R Bruinsma, E A Eklund, R P Karunasiri, J Rudnick, A Zangwill.
Abstract
Thin films that are grown by the process of sputtering are, by and large, quite unlike the smooth, featureless structures that one might expect. In general, these films have a complicated surface morphology and an extended network of grooves and voids in their interiors. Such features can have a profound effect on the physical properties of a thin film. The surface irregularities and the bulk defects are the result of a growth instability due to competitive shadowing, an effect that also plays a role in geological processes such as erosion. For amorphous thin films, the shadow instability can be described by a remarkably simple model, which can be shown to reproduce many important observed characteristics of thin film morphology.Year: 1990 PMID: 17750110 DOI: 10.1126/science.249.4966.264
Source DB: PubMed Journal: Science ISSN: 0036-8075 Impact factor: 47.728