High-throughput combinatorial study of local stress in thin film composition spreads.

We investigate the stresses in thin films with sub-millimeter lateral spatial resolution using a dense array of prefabricated cantilever beams prepared by microelectromechanical-system techniques. Stress induced deflection of the cantilever is interrogated by an optical (laser/position sensitive detector) measurement system. Composition spread films are deposited on the cantilever array using a three gun on-axis magnetron cosputtering system. The position dependent composition is inferred using rate calibrations and verified by electron microprobe/energy dispersive spectroscopy. We demonstrate the function of this system using an Fe-Ni-Al composition spread with approximately 1 at. % resolution. This approach allows for measurement of the composition dependence of other electromechanical properties such as the martensitic phase transition temperature of traditional and ferromagnetic shape-memory alloys, as well as the properties of hydrogen storage materials and the magnetic response of magnetostrictive materials.