Literature DB >> 17572731

Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry.

Peter de Groot1, Xavier Colonna de Lega.   

Abstract

The Fourier components of interference signals generated by scanning a high-numerical-aperture objective orthogonal to an object surface correspond to different angles of incidence on the surface. The phase and amplitude of these Fourier components relate to the structure of the object, including in particular the 3D topography and thickness profiles of thin-film layers.

Year:  2007        PMID： 17572731     DOI： 10.1364/ol.32.001638

Source DB:  PubMed          Journal:  Opt Lett        ISSN： 0146-9592            Impact factor:   3.776


  3 in total

1.  Simultaneous measurements of top surface and its underlying film surfaces in multilayer film structure.

Authors:  Young-Sik Ghim; Hyug-Gyo Rhee; Angela Davies
Journal:  Sci Rep       Date:  2017-09-19       Impact factor: 4.379

2.  Topography Measurement of Large-Range Microstructures through Advanced Fourier-Transform Method and Phase Stitching in Scanning Broadband Light Interferometry.

Authors:  Yi Zhou; Yan Tang; Yong Yang; Song Hu
Journal:  Micromachines (Basel)       Date:  2017-10-26       Impact factor: 2.891

Review 3.  Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures.

Authors:  Ki-Nam Joo; Hyo-Mi Park
Journal:  Micromachines (Basel)       Date:  2022-07-07       Impact factor: 3.523
  3 in total

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