The effect of step height on the performance of three-dimensional ac electro-osmotic microfluidic pumps.

Recent numerical and experimental studies have investigated the increase in efficiency of microfluidic ac electro-osmotic pumps by introducing nonplanar geometries with raised steps on the electrodes. In this study, we analyze the effect of the step height on ac electro-osmotic pump performance. AC electro-osmotic pumps with three-dimensional electroplated steps are fabricated on glass substrates and pumping velocities of low ionic strength electrolyte solutions are measured systematically using a custom microfluidic device. Numerical simulations predict an improvement in pump performance with increasing step height, at a given frequency and voltage, up to an optimal step height, which qualitatively matches the trend observed in experiment. For a broad range of step heights near the optimum, the observed flow is much faster than with existing planar pumps (at the same voltage and minimum feature size) and in the theoretically predicted direction of the "fluid conveyor belt" mechanism. For small step heights, the experiments also exhibit significant flow reversal at the optimal frequency, which cannot be explained by the theory, although the simulations predict weak flow reversal at higher frequencies due to incomplete charging. These results provide insight to an important parameter for the design of nonplanar electro-osmotic pumps and clues to improve the fundamental theory of ACEO.