| Literature DB >> 17268616 |
Tushar Bansal1, Meng-Ping Chang, Michel M Maharbiz.
Abstract
We report a class of 'wet' MEMS elastomer-metal electrostatic actuators which can actuate in air, oil or water environments with no external fluidic connections, has actuation voltages lower than 15 V and is compatible with widespread PDMS microfluidics.Entities:
Mesh：
Substances：
Year: 2006 PMID： 17268616 DOI： 10.1039/b614419e
Source DB: PubMed Journal: Lab Chip ISSN： 1473-0189 Impact factor: 6.799