Ultralow hysteresis superhydrophobic surfaces by excimer laser modification of SU-8.

We present a new and simple method to produce superhydrophobic surfaces with ultralow hysteresis. The method involves surface modification of SU-8 using an excimer laser treatment. The modified surface is coated with a hydrophobic plasma-polymerized hexafluoropropene layer. The advancing and receding water contact angles were measured to be approximately 165 degrees . The achieved water contact angle hysteresis was below the measurement limit. This low hysteresis can be ascribed to nanoscale debris generated during the excimer laser process.