Displacement reactions of covalently attached organosilicon monolayers on Si.

The covalently attached monolayers of alkylsilanes (R(CH(3))(2)SiX) on Si undergo complete displacement by the solutions of different organosilanes (R'(CH(3))(2)SiX). By varying the reaction time, the degree of displacement can be controlled offering a convenient method for the preparation of surfaces with mixed functionalities (R and R').