| Literature DB >> 16889329 |
Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi.
Abstract
In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.Year: 2006 PMID： 16889329 DOI： 10.1109/tuffc.2006.1665070
Source DB: PubMed Journal: IEEE Trans Ultrason Ferroelectr Freq Control ISSN： 0885-3010 Impact factor: 2.725