| Literature DB >> 16529126 |
J L Skinner, G F Cardinale, A A Talin, R W Brocato.
Abstract
The effect of critical dimension (CD) variation and metallization ratio on the efficiency of energy conversion of a surface acoustic wave (SAW) correlator is examined. We find that a 10% variation in the width of finger electrodes predicts only a 1% decrease in the efficiency of energy conversion. Furthermore, our model predicts that a metallization ratio of 0.74 represents an optimum value for energy extraction from the SAW by the interdigitated transducer (IDT).Mesh：
Year: 2006 PMID： 16529126 DOI： 10.1109/tuffc.2006.1593390
Source DB: PubMed Journal: IEEE Trans Ultrason Ferroelectr Freq Control ISSN： 0885-3010 Impact factor: 2.725