| Literature DB >> 16529125 |
Mathias Link, Matthias Schreiter, Jan Weber, Robert Primig, Dana Pitzer, Reinhard Gabl.
Abstract
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.Entities:
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Year: 2006 PMID： 16529125 DOI： 10.1109/tuffc.2006.1593389
Source DB: PubMed Journal: IEEE Trans Ultrason Ferroelectr Freq Control ISSN： 0885-3010 Impact factor: 2.725