Three-dimensional metallized features on polymeric substrates by microcontact printing.

We demonstrate the formation of 3-D metallized features on a polymeric substrate by microcontact printing. A patterned silicon stamp was "inked" with catalytic particles. Thereafter, particles were selectively removed from the raised regions of the stamp. A molten polymer was embossed against the stamp. Upon cooling and separation, the catalytic particles that were within the recessed areas of the stamp were transferred to the polymer. The polymer was then immersed in an electroless plating bath, and metallization occurred selectively on the areas where the catalytic particles were present. We have achieved 3-D metallized columns as small as 500 nm in diameter and about 1 mum tall.