| Literature DB >> 1612624 |
E M Charlson1, E J Charlson, R Sabeti.
Abstract
A new method for selectively depositing conformal, biocompatible coatings of Parylene-C on implantable integrated circuit structures is described. The technique consists of using thin film or diffused resistors to electrically heat the area where an opening in the Parylene is desired. Theoretically predicted and actual Parylene-C thickness are compared.Entities:
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Year: 1992 PMID： 1612624 DOI： 10.1109/10.121652
Source DB: PubMed Journal: IEEE Trans Biomed Eng ISSN： 0018-9294 Impact factor: 4.538