Kinetic evolution and equilibrium morphology of strained islands.

Self-assembled SiGe islands grown on Si(001) leave behind characteristic "footprints" that reveal that small islands shrink, losing material to nearby larger islands. The critical size, dividing shrinking from growing islands, corresponds to the pyramid-to-dome shape transition, consistent with "anomalous coarsening" While shrinking, {105}-faceted pyramids transform into truncated pyramids and ultimately into unfaceted mounds. The similarity to behavior during island growth indicates that island shape and facet formation are thermodynamically determined.