| Literature DB >> 16060505 |
Yongli Huang, Edward O Haeggström, Xuefeng Zhuang, Arif S Ergun, Butrus T Khuri-Yakub.
Abstract
We report on a capacitive micromachined ultrasonic transducer (CMUT) featuring isolation posts (PostCMUT) as a solution to the charging problems caused by device fabrication and operation. This design improves the device reliability. The PostCMUTs were fabricated using a newly developed process based on the wafer-bonding technique. Paired tests showed the superior reliability characteristics of the PostCMUT design compared to those of conventional CMUT designs. No deleterious effect of the new design was seen in preliminary ultrasonic tests or in process yield. PostCMUTs, a design that serves as a solution to the aforementioned reliability problem, constitutes a major contribution to CMUT commercialization.Year: 2005 PMID： 16060505 DOI： 10.1109/tuffc.2005.1428039
Source DB: PubMed Journal: IEEE Trans Ultrason Ferroelectr Freq Control ISSN： 0885-3010 Impact factor: 2.725