High-precision absolute distance and vibration measurement with frequency scanned interferometry.

We report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry-Perot interferometer was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of approximately 50 nm was achieved for absolute distances ranging from 0.1 to 0.7 m by use of the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 to 100 Hz with an amplitude as small as a few nanometers without a priori knowledge.