Chemical sensor based on microfabricated wristwatch tuning forks.

We report here a chemical sensor based on detecting the mechanical response of a thin (approximately 10-microm) polymer wire stretched across the two prongs of a wristwatch quartz tuning fork (QTF). When the fork is set to oscillate, the wire is stretched and compressed by the two prongs. The stretching/compression force changes upon adsorption of analyte molecules onto/into the polymer wire, which is detected by the QTF with pico-Newton force sensitivity. An array of such sensors with different polymer wires is used for simultaneous detection of several analytes and for improvement of pattern recognition. The low cost (approximately 10 cent) of the QTF, together with that an array of QTFs can be driven to oscillate simultaneously and their resonance frequencies detected with the same circuit, promises a high performance, low cost, and portable sensor for detecting various chemical vapors. We demonstrate here detection of parts-per-billion-level water, ethylnitrobenzene, and ethanol vapors using the QTF arrays.