Piezoelectric micromachined ultrasonic transducers: modeling the influence of structural parameters on device performance.

Piezoelectric micromachined ultrasonic transducers (pMUTs), a potential alternative for conventional one-dimensional phased array ultrasonic transducers, were investigated. We used a modeling approach to study the performance of lead zirconate titanate (PZT)-driven pMUTs for the frequency range of 2-10 MHz, optimized for maximum coupling coefficient, as a function of device design. Using original tools designed for the purpose, a comprehensive build-test finite element model was developed to predict and measure the device performance. In particular, the model estimates the device coupling coefficient and the acoustic impedance, besides the readily extractable resonance frequency and bandwidth. To validate the model, a prototype device was built and tested, showing good agreement between the model predictions and experimental results. Modeling results indicate that the coupling coefficient is significantly affected by silicon membrane, PZT, and top electrode thickness as well as the top electrode design. Results also indicate considerable flexibility in maximizing the coupling coefficient while maintaining the device acoustic impedance at a level matching that of the human body. The bandwidth proved to be superior to that of conventional transducers, reaching 102% in some cases.