Material distribution across the interface of random and ordered island arrays.

We grow single and twofold stacked island layers on patterned substrates and investigate the material distribution in and around the patterned area. For both layers a pronounced material depletion region occurs outside the pattern. The material gradients across the planar-patterned interface are symmetric in the first, but highly asymmetric in the second layer. We can describe these phenomena by simulations that take into account the surface curvature for the first and a strain-field modulated surface for the second layer.