Literature DB >> 15143646

Vacuum-ultraviolet beam array generation by flat micro-optical structures.

R Grunwald1, U Neumann, V Kebbel, H J Kühn, K Mann, U Leinhos, H Mischke, D Wulff-Molder.   

Abstract

Micro-optical structures for VUV laser beam shaping and wave-front sensing were manufactured by thin-film deposition onto CaF2 and transfer by etching. Arrays of Bessel-like F2 laser beams at a wavelength of 157 nm with extremely small conical angles were generated by microaxicon lenses. Beam propagation was studied in simulations and experiments. Apodization by absorbing layers is proposed for beam cleaning.

Entities:  

Year:  2004        PMID: 15143646     DOI: 10.1364/ol.29.000977

Source DB:  PubMed          Journal:  Opt Lett        ISSN: 0146-9592            Impact factor:   3.776


  1 in total

1.  Nanolithography using Bessel Beams of Extreme Ultraviolet Wavelength.

Authors:  Daniel Fan; Li Wang; Yasin Ekinci
Journal:  Sci Rep       Date:  2016-08-09       Impact factor: 4.379

  1 in total

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