Refractive microlens array for wave-front analysis in the medium to hard x-ray range.

We report an alternative approach to x-ray wave-front analysis that uses a refractive microlens array as a Shack-Hartmann sensor. The sensor was manufactured by self-assembly and electroplating techniques and is suitable for high-resolution wave-front analysis of medium to hard x rays. We demonstrate its effectiveness at an x-ray energy of 3 keV for analysis of x-ray wave-front perturbations caused by microscopic objects. The sensor has potential advantages over other methods for x-ray phase imaging and will also be useful for the characterization of x-ray beams and optics.