Authors: Donald R Baer; Mark H Engelhard; Grant E Johnson; Julia Laskin; Jinfeng Lai; Karl Mueller; Prabhakaran Munusamy; Suntharampillai Thevuthasan; Hongfei Wang; Nancy Washton; Alison Elder; Brittany L Baisch; Ajay Karakoti; Satyanarayana V N T Kuchibhatla; Daewon Moon Journal: J Vac Sci Technol A Date: 2013-08-27 Impact factor: 2.427