Literature DB >> 14680168

Using diffractograms to evaluate optical systems with coherent illumination.

E Voelkl1.   

Abstract

A new approach to measuring aberrations of an optical system with coherent illumination is introduced. The optical system is evaluated by use of a so-called weak phase object and by digital image recording and processing. Based on the contrast transfer function theory for coherent systems, the main aberrations of the optical system can be determined. This is a convenient approach to evaluating and measuring complex optical systems with numerous optical elements after assembly and can serve as a simple performance test of an optical instrument in the field.

Year:  2003        PMID: 14680168     DOI: 10.1364/ol.28.002318

Source DB:  PubMed          Journal:  Opt Lett        ISSN: 0146-9592            Impact factor:   3.776


  1 in total

1.  Extreme ultraviolet microscope characterization using photomask surface roughness.

Authors:  Gautam Gunjala; Antoine Wojdyla; Stuart Sherwin; Aamod Shanker; Markus P Benk; Kenneth A Goldberg; Patrick P Naulleau; Laura Waller
Journal:  Sci Rep       Date:  2020-07-15       Impact factor: 4.379

  1 in total

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