| Literature DB >> 14587801 |
Weilun Chao1, Erik Anderson, Gregory P Denbeaux, Bruce Harteneck, J Alexander Liddle, Deirdre L Olynick, Angelic L Pearson, Farhad Salmassi, Cheng Yu Song, David T Attwood.
Abstract
A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.Year: 2003 PMID： 14587801 DOI： 10.1364/ol.28.002019
Source DB: PubMed Journal: Opt Lett ISSN： 0146-9592 Impact factor: 3.776