Spectroscopic electron tomography.

The elemental mapping techniques in analytical transmission electron microscopy (TEM), energy filtered imaging (EFTEM) and EDX-mapping, are shown to provide new routes for tomographic reconstructions of 3D chemical maps on the nanoscale. The inelastic scattering does not only provide chemical sensitivity but also improves the linear projection relationship between mass density and image intensity, which often fails in bright field TEM of crystalline materials due to diffraction contrast. Instrumental requirements and artefact sources within the contrast formation mechanisms and within the numerical reconstruction are assessed.