| Literature DB >> 12572796 |
Abstract
Microelectromechanical systems promise to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, moving us closer towards the realization of complete systems-on-a-chip. Anil Deisingh talks us through the basics of MEMS technology and the growing role of these new "micromachines" in analytical chemistry applications.Entities:
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Year: 2003 PMID: 12572796 DOI: 10.1039/b211229a
Source DB: PubMed Journal: Analyst ISSN: 0003-2654 Impact factor: 4.616