Semiautomated analytical image correlation.

Machine vision refers to computer programs consisting of a collection of pattern recognition and digital image processing algorithms (Fabel, G. Motion Control 2000, 53-54). A version of machine vision has been applied to correlating digital images generated by optical microscopy and secondary ion mass spectrometry (SIMS). By suitable application of image processing algorithms, semiautomated correlation between optical and secondary ion images is possible. For correlation of minor constituents evident in secondary ion images but invisible in optical images, correlation is performed by reference to the relative position of minor to major constituents. Precise coordinates of features apparent in one analytical image can be translated into the corresponding coordinates of an analytical image obtained by a different method. In principle, this capability yields a semiautomated system to combine complementary features of disparate imaging methods, such as secondary ion and optical microscopy.