Characterization of nano-dimensional thin-film elastic moduli using magnetoelastic sensors.

Application of magnetoelastic thick-film sensors to the measurement of thin-film elastic moduli is described in this study. An analytical model is derived, that relates the resonant frequency of a magnetoelastic sensor to the elasticity and density of an applied thin-film. Limits of the model are analyzed, and related to experimental measurements using thin-films of silver and aluminum. For 500 nm thick-films, the measured Young's modulus of elasticity for Al and Ag is found to be within 1.6% of standard data. Using commercially available magnetoelastic sensors, the elasticity of coatings, approximately 30 nm thick, can readily be measured. c2001 Elsevier Science B.V. All rights reserved.