Literature DB >> 12064417

Black layer coatings for the photolithographic manufacture of diffraction gratings.

Daniel Poitras1, J A Dobrowolski, Tom Cassidy, Clive Midwinter, C Thomas McElroy.   

Abstract

A black layer coating for an aluminum-photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25 degrees is described. It is made of space-compatible materials, and its rms roughness is less than 15 A.

Entities:  

Year:  2002        PMID: 12064417     DOI: 10.1364/ao.41.003306

Source DB:  PubMed          Journal:  Appl Opt        ISSN: 1559-128X            Impact factor:   1.980


  1 in total

1.  Manufacturing problem contest [invited].

Authors:  Daniel Poitras; Li Li; Michael Jacobson; Catherine Cooksey
Journal:  Appl Opt       Date:  2017-02-01       Impact factor: 1.980

  1 in total

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